Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1995-12-13
1999-10-26
Kincaid, Kristine
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
3613213, 257296, 257303, 257306, H01G 406
Patent
active
059739100
ABSTRACT:
A decoupling capacitor incorporated into an integrated circuit. The capacitor is disposed over a first region of a substrate including electronic circuitry, and not over a second region of the substrate. The capacitor including a lower and an upper conductive layer separated by an interposing insulative layer. An additional insulative layer is disposed beneath the lower conductive layer while another insulative layer is disposed above the upper conductive layer, and the capacitor provides capacitance for the electronic circuitry.
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Hartmut Roskos, Martin C. Nuss, Keith W. Goossen, David W. Kisker, Alice E. White, Ken T. Short, Dale C. Jacobson, & John M. Poate, "Propagation of Picosecond Electrical Pulses on a Silicon-Based Microstrip Line With Buried Cobalt Silicide Ground Plane", Appl. Phys. Lett 58(23), Jun. 10, 1991, pp. 2604-2606.
Dinkins Anthony
Intel Corporation
Kincaid Kristine
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