Decoupled xyz stage

Details Decoupled xyz stage Decoupled xyz stage

1997-12-30

1999-10-26

Ryan, Patrick

Metal fusion bonding

Process

Plural joints

228 45, 7449009, H01L 2160, G05G 1100

Patent

active

059712546

ABSTRACT:
The invention includes an XYZ stage 100 for positioning an object 140 in an X direction, a Y direction orthogonal to said X direction, and a Z direction orthogonal to both said X and Y directions. The stage 100 comprises a generally horizontal movable stage 104, a stationary X motor connected to said movable stage 104 for moving said stage in an X direction, a stationary Y motor 106 movably connected to said movable stage 104 for moving the stage 102 in a Y direction independently of the X direction, wherein the stage 100 has an L shaped bell crank 132 having an outside corner pivotally mounted on the stage 104 so that the bell crank 132 is rotatable in a vertical plane through the stage about an axis in the X direction, and a stationary Z axis motor connected to one end of the bell crank for movement of this one end in a Y direction. The other end of the bell crank thus moves in a Z direction.

REFERENCES:
patent: 5157985 (1992-10-01), Yamazaki et al.
patent: 5653375 (1997-08-01), Nam
patent: 5735449 (1998-04-01), Magni

Affiliated with

Also associated with

Rating

Decoupled xyz stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Decoupled xyz stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Decoupled xyz stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-753955