Decomposition of fluorine containing compounds

Details Decomposition of fluorine containing compounds Decomposition of fluorine containing compounds

2005-07-26

2005-07-26

Nguyen, Ngoc-Yen (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

C423S245300

Reexamination Certificate

active

06921519

ABSTRACT:
A process for the decomposition and removal of one or more fluorine containing compounds from a first gaseous mixture comprising the one or more fluorine containing compounds and water vapour, which process comprises the stages of: (i) contacting the first gaseous mixture with a catalyst comprising an aluminium based material to produce a second gaseous mixture comprising hydrogen fluoride and carbon oxides; and (ii) removing the hydrogen fluoride from the second gaseous mixture to produce a third gaseous mixture, which is substantially free of hydrogen fluoride.

REFERENCES:
patent: 3790143 (1974-02-01), Nix
patent: 3813852 (1974-06-01), Steineke
patent: 5108977 (1992-04-01), Yoshida et al.
patent: 5151263 (1992-09-01), Okazaki et al.
patent: 5276249 (1994-01-01), Greene et al.
patent: 5283041 (1994-02-01), Nguyen et al.
patent: 5378444 (1995-01-01), Akita et al.
patent: 5417934 (1995-05-01), Smith et al.
patent: 5417948 (1995-05-01), Iwata et al.
patent: 5649985 (1997-07-01), Imamura
patent: 5817284 (1998-10-01), Nakano et al.
patent: 5879646 (1999-03-01), Orihara et al.
patent: 6004377 (1999-12-01), Tamata et al.
patent: 6069291 (2000-05-01), Rossin et al.
patent: 6077482 (2000-06-01), Kanno et al.
patent: 6110436 (2000-08-01), Scholz et al.
patent: 6602480 (2003-08-01), Mori
patent: 6673326 (2004-01-01), Rossin et al.
patent: 2001/0001652 (2001-05-01), Kanno et al.
patent: 0 885 648 (1998-12-01), None
patent: 0 898 999 (1999-03-01), None
patent: 0 916 388 (1999-05-01), None
patent: 2 295 101 (1996-05-01), None
patent: 61 204025 (1986-09-01), None
patent: 63 200820 (1988-08-01), None
patent: 06 047234 (1994-02-01), None
patent: 07 39721 (1995-02-01), None
patent: 07 265663 (1995-10-01), None
patent: 10 192653 (1998-07-01), None
patent: 10 216479 (1998-08-01), None
patent: 10 249188 (1998-09-01), None
patent: 11 047555 (1999-02-01), None
patent: 11 090179 (1999-04-01), None
patent: 11 090180 (1999-04-01), None
patent: 11 221437 (1999-08-01), None
patent: PCT/GB02/00264 (2002-05-01), None
patent: PCT/GB02/00264 (2003-04-01), None
Brown, Roy S., et al., “Catalytic Control of Emissions During Semiconductor Manufacture,”.

Affiliated with

Also associated with

Rating

Decomposition of fluorine containing compounds does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Decomposition of fluorine containing compounds, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Decomposition of fluorine containing compounds will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3407414