Decelerating and focusing ion beam device

Details Decelerating and focusing ion beam device Decelerating and focusing ion beam device

1996-03-04

1998-05-05

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave directional modulation

250398, 2504922, 25049221, 250396R, G02B 2608, G01K 108

Patent

active

057483604

ABSTRACT:
A decelerating and focusing ion beam device is provided with an ion source, a focusing lens system having a plurality of focusing lenses and a multiple decelerating lens system having a plurality of decelerating lenses. It is possible to realize selective super-refined crystal growth and superficial etching with very high accuracy.

REFERENCES:
patent: 4563587 (1986-01-01), Ward et al.
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4687940 (1987-08-01), Ward et al.
patent: 4713543 (1987-12-01), Feuerbaum et al.
patent: 5393985 (1995-02-01), Yamakage et al.
patent: 5504340 (1996-04-01), Mizumura et al.
patent: 5539203 (1996-07-01), Ohdomari
patent: 5574280 (1996-11-01), Fujii et al.

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