Debris removing system for use in X-ray light source

Details Debris removing system for use in X-ray light source Debris removing system for use in X-ray light source

2005-03-15

2005-03-15

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S071000, C378S034000, C378S160000

Reexamination Certificate

active

06867843

ABSTRACT:
A debris removing system prevents debris from being scattered from an X-ray source. The debris removing system includes an attracting unit, disposed between a light emission point of the X-ray source and the optical system, for attracting debris. The attracting unit has an attracting surface parallel or approximately parallel to an axis passing through the light emission point. The debris removing system further includes a rotation unit for rotating the attracting unit about the axis. This debris removing system assures a superior debris removing effect and a good EUV light utilization efficiency, being compatible with each other.

REFERENCES:
patent: 4408338 (1983-10-01), Grobman
patent: 5549994 (1996-08-01), Watanabe et al.
patent: 5896438 (1999-04-01), Miyake et al.
patent: 6038279 (2000-03-01), Miyake et al.
patent: 6317479 (2001-11-01), Chiba et al.
patent: 20020090054 (2002-07-01), Sogard
patent: 9-320792 (1997-12-01), None
patent: 2001-57298 (2001-02-01), None
patent: 2001-68297 (2001-03-01), None
patent: WO 9610324 (1996-04-01), None
patent: WO 0137309 (2001-05-01), None
European Search Report dated Oct. 3, 2002, issued in corresponding European patent appln. No. 02254687.3-1231, forwarded in a Communication dated Oct. 25, 2002.

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