Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2008-04-08
2008-04-08
Vanore, David A. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S034000, C378S156000
Reexamination Certificate
active
11193212
ABSTRACT:
Numerous embodiments of a debris mitigation device are disclosed. One embodiment of the claimed subject matter may comprise a debris mitigation device for use in photolithography processes. In one embodiment, the debris mitigation device comprises a foil trap device. The foil trap device, in this embodiment, comprises a plurality of electrically conductive elements and one or more mounting devices, where the plurality of electrically conductive elements are coupled to the one or more mounting devices in such as way as to provide a space between one or more adjacent elements. In this embodiment, the elements are foil elements, and adjacent foil elements carry alternating potentials.
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Intel Corporation
Nelson Kenneth A.
Vanore David A.
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