Debris mitigation device

Details Debris mitigation device Debris mitigation device

2005-11-08

2005-11-08

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C250S495100, C378S034000, C378S035000, C378S119000

Reexamination Certificate

active

06963071

ABSTRACT:
Numerous embodiments of a debris mitigation device are disclosed. One embodiment of the claimed subject matter may comprise a debris mitigation device for use in photolithography processes. In one embodiment, the debris mitigation device comprises a foil trap device. The foil trap device, in this embodiment, comprises a plurality of electrically conductive elements and one or more mounting devices, where the plurality of electrically conductive elements are coupled to the one or more mounting devices in such as way as to provide a space between one or more adjacent elements. In this embodiment, the elements are foil elements, and adjacent foil elements carry alternating potentials.

REFERENCES:
patent: 5838016 (1998-11-01), Johnson
patent: 6421421 (2002-07-01), McGeoch
patent: 6683936 (2004-01-01), Jonkers

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