Deaerating apparatus, deaerating method, and treatment apparatus

Details Deaerating apparatus, deaerating method, and treatment apparatus Deaerating apparatus, deaerating method, and treatment apparatus

1998-02-13

1999-11-30

Chiesa, Richard L.

Gas separation: processes

Degasification of liquid

By liquid flow modifying or mechanical agitating

95266, 96157, 96196, 96216, 96214, B01D 1900

Patent

active

059935189

ABSTRACT:
A deaerating apparatus for removing a gas from a liquid, including a liquid container rotatable and storing the liquid from which the gas is to be removed, a rotating device for rotating the liquid container, a sucking device for absorbing the gas from the liquid container; a feed-out device for feeding out the liquid stored in the liquid container, a liquid introducing pipe for introducing the liquid into the liquid container, a gas exhausting pipe for exhausting the gas from the liquid container, a liquid feed-out pipe for feeding out the liquid from the liquid container, and a head member which is removably placed on the liquid container, with the head member in contact with the liquid container. With the head member separated a predetermined interval from the liquid container, the liquid container is rotated to collect the gas contained in the liquid to the center of the liquid container. Then, the gas in the liquid container is absorbed, with the liquid container semi-closed. In this manner, the gas contained in a liquid such as a resist solution, a developing solution, and a solvent can be removed sufficiently.

REFERENCES:
patent: 4360428 (1982-11-01), Comparetto et al.
patent: 4908048 (1990-03-01), Hofmann et al.
patent: 5000766 (1991-03-01), Yano et al.
patent: 5190515 (1993-03-01), Eaton et al.
patent: 5626913 (1997-05-01), Tomoeda

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