DC reactively sputtered optical coatings including niobium oxide

Details DC reactively sputtered optical coatings including niobium oxide DC reactively sputtered optical coatings including niobium oxide

1993-10-19

1994-12-13

Turner, A. A.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

359580, 359585, 359586, 428212, 428469, 428472, 428699, 428701, 428702, 428426, 428913, B32B 1706

Patent

active

053728742

ABSTRACT:
A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering.

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patent: 5140457 (1992-08-01), Letter
Thin-Film Optical Filters, 2nd ed., Ch. 5, Multilayer High-Reflectance Coatings, Macleod, H. A., MacmMillan Publishing Company, New York (1986).
Thin-Film Optical Filters, 2nd ed., Appendix Characteristics of Thin-Film Materials, Macleod, H. A., Macmillan Publishing Company, New York (1986).
Three-Layered Reflection-Reducing Coatings, Lockhart, et al., Sep. 1947, J. Opt. Soc. Am. vol. 37, pp. 689-694.
Some Properties and Electrical Instabilities in RF Sputtered Niobium Oxide Films, Chen, Jul. 1972, J. Electrochem. Soc. (USA), vol. 119, No. 7, pp. 887-892.
Preparation, Optical and Dielectric Properties of Vapor Deposited Niobium Oxide Thin Films, Duffy, et al., Feb. 1969, J. Electrochem. Soc. (USA) vol. 116, No. 2, pp. 234-239.

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