DC reactively sputtered antireflection coatings

Details DC reactively sputtered antireflection coatings DC reactively sputtered antireflection coatings

1990-10-11

1992-04-14

Arnold, Bruce Y.

Optical: systems and elements

Light interference

Produced by coating or lamina

359581, 359589, G02B 110

Patent

active

051053101

ABSTRACT:
A multilayer antireflection coating designed for deposition in in-line coating machines by DC reactive sputtering. About half of the total thickness of the coating may be formed from zinc oxide which has a high sputtering rate.

REFERENCES:
patent: 2478385 (1949-08-01), Gaiser
patent: 3432225 (1964-05-01), Rock
patent: 3565509 (1971-02-01), Sulzbach
patent: 3604784 (1971-09-01), Louderback et al.
patent: 3781090 (1973-12-01), Sumita
patent: 3960441 (1976-06-01), Kamiya et al.
patent: 4012119 (1977-03-01), Adams et al.
patent: 4313647 (1982-02-01), Takazawa
patent: 4714308 (1987-12-01), Sawamura et al.
patent: 4997241 (1991-03-01), Muratomi
patent: 5007710 (1991-04-01), Nakajima et al.

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