Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-06-27
2006-06-27
Tsai, Carol S. W. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S023000, C702S032000, C702S033000, C702S040000, C702S179000, C356S432000, C356S445000
Reexamination Certificate
active
07069182
ABSTRACT:
A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.
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Johnson Kenneth C.
Stanke Fred E.
Stallman & Pollock LLP
Tokyo Electron Limited
Tsai Carol S. W.
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