Data writing method and device of semiconductor device

Details Data writing method and device of semiconductor device Data writing method and device of semiconductor device

1996-03-05

1998-04-07

Dinh, Tan

Dynamic information storage or retrieval

Simultaneous diverse types of storage or retrieval

365114, G11B 1300, G11C 1134

Patent

active

057372810

ABSTRACT:
An ultraviolet laser beam emitted from a laser beam source 1 is subjected to on/off control at an AOM 3, is linearly scanned at an equal speed by a polygon mirror 5 and an f.THETA. lens 6, is collected by an object lens 7, and is selectively spot-irradiated to a memory cell array of a semiconductor chip 8 on an XY stage 9 two-dimensionally moved by a control device 10 so as to write a pattern corresponding to desired data, whereby a custom ROM can be supplied in flexible production on a timely basis meeting market trends.

REFERENCES:
patent: 4469527 (1984-09-01), Sugano et al.
patent: 5387106 (1995-02-01), Mackenzie et al.
patent: 5444651 (1995-08-01), Yamamoto et al.

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