Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-06-26
2007-06-26
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000, C702S182000
Reexamination Certificate
active
11224388
ABSTRACT:
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
REFERENCES:
patent: 6790686 (2004-09-01), Purdy et al.
patent: 6834213 (2004-12-01), Sonderman et al.
patent: 6937914 (2005-08-01), Bode et al.
patent: 6957120 (2005-10-01), Bode et al.
patent: 2004/0029299 (2004-02-01), Pasadyn et al.
McIntyre Michael G.
Reeves Steven P.
Advanced Micro Devices , Inc.
Lee Douglas S.
Picard Leo
Williams Morgan & Amerson P.C.
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