Data processing equipment, inspection assistance system, and...

Details Data processing equipment, inspection assistance system, and... Data processing equipment, inspection assistance system, and...

2005-11-15

2009-10-20

Couso, Yon (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C348S129000

Reexamination Certificate

active

07606409

ABSTRACT:
A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.

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