Data processing and management equipment and method for data...

Details Data processing and management equipment and method for data... Data processing and management equipment and method for data...

2011-03-08

2011-03-08

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Statistical measurement

C438S014000

Reexamination Certificate

active

07904275

ABSTRACT:
Management of countermeasure of pollution particles deposited on an object to be processed is optimized based on a cause of the pollution. Data processing and management equipment1comprises a functional approximation part2to make a mathematical model of a relation between measured numbers of particles deposited on a substrate during processing in a surface structuring device or a film forming device and accumulated amount processed after cleaning up of the device by a functional equation based on a cause of the deposit of the particles. A judging part3specifies the cause of the deposit of particles by comparing the functional equation with the measured numbers of particles.

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T. Moriya, M. Shimada and K. Okuyama; “Reduction of particles in plasma etching device—Monitoring of particles and inhibition of production of particles in etching device”,, Clean Technology (Feb. 2006).
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S. Sato, A. Tsukune, T. Goto; Visualization of backflow particles from turbo molecular pump—Are particles in lower chamber really recoiled?, Clean Technology (Jun. 2003).

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