Data collection method, substrate processing apparatus, and...

Details Data collection method, substrate processing apparatus, and... Data collection method, substrate processing apparatus, and...

2007-07-09

2009-02-10

Lau, Tung S (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

C702S082000, C702S127000, C700S108000, C700S121000, C700S223000

Reexamination Certificate

active

07490010

ABSTRACT:
When measurement data collected with a specific sampling cycle by MCs from measuring instrument units are stored into a data storage apparatus, a sampling controller adjusts the sampling cycle to a longer setting if the apparatus state is other than a substrate processing execution state (e.g., an idling state) compared to the sampling cycle set in the substrate processing execution state, so as to minimize the volume of data stored into the data storage apparatus.

REFERENCES:
patent: 7113838 (2006-09-01), Funk et al.
patent: 2005/0171627 (2005-08-01), Funk et al.
patent: 2007/0219664 (2007-09-01), Yasukawa et al.
patent: 11-87323 (1999-03-01), None
patent: 2004-39952 (2004-02-01), None

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