Optics: measuring and testing – By light interference – Having light beams of different frequencies
Reexamination Certificate
2006-11-29
2009-06-02
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
Having light beams of different frequencies
C702S127000
Reexamination Certificate
active
07542147
ABSTRACT:
A method is disclosed including conditioning a measurement signal from an interferometer, said conditioning characterized by one or more conditioning parameters; measuring a plurality of values for the conditioned measurement signal; providing one or more values indicative of the conditioning parameters; determining an adjustment value at each measured value of the conditioned measurement signal based on the one or more of the measured values indicative of the conditioning parameters; and adjusting a measured value of the measurement signal according to the adjustment value.
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Fish & Richardson P.C.
Lyons Michael A
Zygo Corporation
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