Dark field, photon tunneling imaging systems and methods

Details Dark field, photon tunneling imaging systems and methods Dark field, photon tunneling imaging systems and methods

1996-06-28

1998-02-03

Evans, F. L

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, 25055922, G01B 1124, G01B 1130

Patent

active

057150591

ABSTRACT:
A dark-field imaging system and method is disclosed that employs photon tunneling to visualize and measure submicron features of reflecting or transmissive materials within the subnanometer-to-several-micron range. The system comprises an illumination section for providing an evanescent field, where the evenescent field is selectively scattered by the surface of the reflecting or transmissive material, and a collection section for transmitting the radiant energy produced by the evanescent field scattering to an imaging section, which may be a vidicon, digital camera, or other photo detector device. Various embodiments are disclosed including the use of a bulk optic prismatic element, the forward aplantic element of a compound microscope objective, diffracting gratings, and optical waveguides. In each embodiment the collection section and illumination section may be completely optically, and thus physically, uncoupled.

REFERENCES:
patent: 4681321 (1987-07-01), Guerra et al.
patent: 5088321 (1992-02-01), Kajikawa et al.

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