Damping support structure

Details Damping support structure Damping support structure

1989-06-01

1990-12-11

Butler, Douglas C.

Spring devices

Resilient shock or vibration absorber

188378, 248550, F16F 710

Patent

active

049764152

ABSTRACT:
A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.

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