Damping polyurethane CMP pads with microfillers

Details Damping polyurethane CMP pads with microfillers Damping polyurethane CMP pads with microfillers

2007-11-20

2011-11-08

Culbert, Roberts (Department: 1716)

Abrading

Flexible-member tool, per se

C156S078000, C051S295000, C051S296000

Reexamination Certificate

active

08052507

ABSTRACT:
A system for preparing a microcellular polyurethane material, includes a froth, prepared, for instance, by inert gas frothing a urethane prepolymer, preferably an aliphatic isocyanate polyether prepolymer, in the presence of a surfactant; a filler soluble in a CMP slurry; and a curative, preferably including an aromatic diamine and a triol. To produce the microcellular material, the froth can be combined with the filler, e.g., PVP, followed by curing the resulting mixture. The microcellular material has a low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing. CMP pads using the microcellular material have pores created by inert gas frothing throughout the pad polymer body and additional surface pores created by dissolution of fillers during polishing, providing flexibility in surface softness and pad stiffness.

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