Damped control of a micromechanical device

Details Damped control of a micromechanical device Damped control of a micromechanical device

2005-05-10

2005-05-10

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S296000, C359S224200, C359S230000, C359S295000

Reexamination Certificate

active

06891657

ABSTRACT:
Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

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