Damascene process for fabricating poles in recording heads

Details Damascene process for fabricating poles in recording heads Damascene process for fabricating poles in recording heads

2005-01-31

2008-11-04

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603130, C029S603140, C029S603150, C029S603180, C216S062000, C216S066000, C216S067000, C360S121000, C360S122000, C360S317000, C451S005000, C451S041000

Reexamination Certificate

active

07444740

ABSTRACT:
A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.

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Okada, T.; Kawato, Y.; Haginoya, C.; Nunokawa, I.; Etoh, K.; Fuyama, M.; “Fabrication process for a trapezoidal main pole for single-pole-type heads”, IEEE Transactions on Magnetics, vol. 38, Issue 5, pp. 2249-2252, Sep. 2002.
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