Damascene optical waveguides

Details Damascene optical waveguides Damascene optical waveguides

2005-12-13

2005-12-13

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

Planar optical waveguide

C264S029300

Reexamination Certificate

active

06975802

ABSTRACT:
A method for fabricating electromagnetic waveguides. The primary expected application is for the formation of dielectric type waveguides suitable for the confinement and guidance of intra-red and visible wavelengths. A secondary application is the formation of waveguides which can be filled with liquids or gases. The method uses standard microelectronic processing techniques.

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patent: 2002/0072243 (2002-06-01), Craighead et al.
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patent: 2004/0209392 (2004-10-01), Craighead et al.
patent: 2005/0023656 (2005-02-01), Leedy
patent: 2005/0174191 (2005-08-01), Brunker et al.

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