Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-10-02
2007-10-02
Kim, Paul (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603130, C029S603140, C029S603150, C029S603180, C029S606000, C216S062000, C216S065000, C216S066000, C360S122000, C360S125330, C360S317000, C451S005000, C451S041000
Reexamination Certificate
active
10735112
ABSTRACT:
An improved damascene method of forming a write coil of a magnetic head. The method includes the steps of forming a hard mask layer over an insulator layer; forming a photoresist layer over the hard mask layer; performing an image patterning process to produce a write coil pattern in the photoresist layer; etching to remove portions of the hard mask layer in accordance with the write coil pattern; etching to remove portions of the insulator layer in accordance with the write coil pattern; etching to remove the remaining portion of the etched hard mask layer; after removing the etched hard mask layer, electroplating a material within the etched portion of the insulator material; and performing a chemical-mechanical polishing (CMP) process over the electroplated material. By removing the remainder of the hard mask material before the CMP, the quality of the CMP is improved.
REFERENCES:
patent: 4539616 (1985-09-01), Yuito et al.
patent: 4684438 (1987-08-01), Lazzari
patent: 4838994 (1989-06-01), Gulde et al.
patent: 4933209 (1990-06-01), Anthony et al.
patent: 5407530 (1995-04-01), Watanabe et al.
patent: 5665251 (1997-09-01), Robertson et al.
patent: 6515826 (2003-02-01), Hsiao et al.
patent: 6804879 (2004-10-01), Hsiao et al.
patent: 6930034 (2005-08-01), Colburn et al.
patent: 2002/0016057 (2002-02-01), Lamb, III et al.
patent: 61156509 (1986-07-01), None
patent: 61276208 (1986-12-01), None
patent: 63-113812 (1988-05-01), None
patent: 2-230505 (1989-03-01), None
patent: 2000065617 (2003-03-01), None
H. Yoshimizu et al., Thin Film Magnetic Film Head Composed of Inorganic Materials, IEEE Transaction on Magnetics, 28, No. 5, Sep. 1992.
Allen Donald Giles
Contreras Richard Jule
Feldbaum Michael
Ramasubramanian Murali
Hitachi Global Storage Technologies - Netherlands B.V.
Kim Paul
Nader Rambod
Oskorep, Esq. John J.
LandOfFree
Damascene method for forming write coils of magnetic heads does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Damascene method for forming write coils of magnetic heads, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Damascene method for forming write coils of magnetic heads will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3858809