Czochralski crystal growth system with an independently supporte

Details Czochralski crystal growth system with an independently supporte Czochralski crystal growth system with an independently supporte

1997-01-23

1999-03-09

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117200, 117218, 117900, C30B 3500

Patent

active

058794522

ABSTRACT:
The pull head of a Czochralski crystal puller is mounted on a frame which is supported independently from the crystal puller receiving chamber. In particular, the pull head is mounted on a rigid frame which is supported by the same surface that supports the melt charge crucible. The pull head thereby can be aligned relative to the rigid frame, rather than to the receiving chamber, and can be accurately aligned with the crucible rotation axis and positioned in order to insure that its rotation axis is vertical. In one embodiment, the pull head is mounted on a plate which engages alignment pins attached to the rigid frame. The alignment pins insure proper alignment of the pull head relative to the frame. When the receiving chamber is raised to allow the crystal to be removed, the plate is engaged by the receiving chamber and lifted off the alignment pins so that the pull head moves with the receiving chamber. When the receiving chamber is moved back into its ingot-growing position and lowered, the alignment pins reengage the plate to realign the pull head. In this embodiment, the pull head is connected to the receiving chamber by a flexible bellows so that the pull head remains vacuum sealed to the receiving chamber when the chamber is lowered and the alignment pins are engaged.

REFERENCES:
patent: 3906181 (1975-09-01), Hibino et al.
patent: 4367199 (1983-01-01), Jericho

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