Cylindrical multiple-pole mass filter with CVD-deposited electro

Details Cylindrical multiple-pole mass filter with CVD-deposited electro Cylindrical multiple-pole mass filter with CVD-deposited electro

1997-01-21

1998-12-22

Nguyen, Kiet T.

Radiant energy

Ionic separation or analysis

Cyclically varying ion selecting field means

313256, H01J 4942

Patent

active

058523022

ABSTRACT:
A quadrupole mass filter, or a multiple-pole mass filter in general, composed of a cylindrical main body made of an insulating material and having a star-shaped cross-sectional profile whose inward bulges are curved substantially hyperbolic, and four electrode layers of a high melting point metal deposited by a chemical vapor deposition (CVD) process. The four electrode layers are separated at the outward bulges of the star-shaped cross-sectional profile. The quadrupole mass filter has pre-rod electrodes.

REFERENCES:
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patent: 5373157 (1994-12-01), Hiroki et al.
patent: 5525084 (1996-06-01), Broadbent et al.
patent: 5616919 (1997-04-01), Broadbent et al.
Burzynski "Microprocessor controlled quadrupole mass Spectrometer" vacuum/vol. 32/No. 3/pp. 163-168/Mar. 1982/Great Britain.

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