Cylinder, load port using it, and production system

Material or article handling – Apparatus for moving material between zones having different...

Reexamination Certificate

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Details

C414S935000

Reexamination Certificate

active

07377736

ABSTRACT:
A cylinder which can precisely feed a piston rod3into three different positions. The cylinder includes a spring receiving member14which is placed coaxially with the piston rod in a piston room. Movement of the piston4is limited by one end of the piston room and a stopper8formed on the piston rod which prevents the piston from moving in the opposite direction. A first spring member15is disposed in the cylinder tube2to separate the spring receiving member from the piston. A hollow9is formed on the periphery of the piston rod at a further position from the piston than the stopper and a stop pin11in the cylinder tube2which is biased in the direction of the hollow by a second spring member12engages with the hollow. A load port utilizes the cylinder for a production system.

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