Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
Reexamination Certificate
2008-01-15
2008-01-15
Nazario-Gonzalez, Porfirio (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Silicon containing
C556S487000, C556S489000
Reexamination Certificate
active
07319159
ABSTRACT:
Silane gas precursor compounds having the formula (I):wherein R1, R2, and R3each can independently be hydrogen or halogen and wherein the cyclohexadiene ring can have one or more substituents selected from the group consisting of a saturated or unsaturated, straight chain or branched alkyl group, a halogen, NO2, and C≡N are disclosed. In one form, the silane gas precursor compound is cyclohexadien-2,4-ylsilane, an air-stable liquid, that can be thermolyzed in a pyrolysis process to efficiently generate high purity silane gas. The compounds of the present invention can thus serve as a “point-of-use” precursor for silane gas.
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Kuech Thomas F.
Roberts John A.
Saulys Dovas A.
Nazario-Gonzalez Porfirio
Quarles & Brady LLP
Wisconsin Alumni Research Foundation
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