Cyclic hot-filament CVD of diamond

Details Cyclic hot-filament CVD of diamond Cyclic hot-filament CVD of diamond

1993-11-10

1996-05-14

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

427577, 4272551, 4272555, 427122, 423446, C23C 1626

Patent

active

055165540

ABSTRACT:
The steady state operating parameters of a low pressure cyclic hot-filament chemical vapor deposition process for making diamond, i.e., nucleation-growth and graphite removal, are applied as controlled sequential steps to favor nucleation and growth.

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