Cyclic carbonate compounds, method for producing the same and po

Details Cyclic carbonate compounds, method for producing the same and po Cyclic carbonate compounds, method for producing the same and po

1994-04-05

1995-05-30

Lee, Mary C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Carbonate esters

C07C 6996

Patent

active

054203317

ABSTRACT:
This invention provides a process for producing a cyclic carbonate compound represented by the following formula (5): ##STR1## or the like which is useful as a dissolution inhibitor for use in a chemically amplified positive photoresist, as well as a positive photoresist composition comprising said cyclic carbonate compound, an alkali-soluble resin and a photo-induced acid precursor. This composition gives a positive photoresist excellent in performances such as resolution, profile, sensitivity, etc.

REFERENCES:
patent: 5130225 (1992-07-01), Uetani
Houlihan, F. et al. Canadian Journal of Chemistry 1985, 63, 153-162.
The Japan Society of Applied Physics and Related Societies, The 38th Spring Meeting, 1991, (29a-ZC-7).
The Japan Society of Applied Physics and Related Societies, The 38th Spring Meeting, 1991, (30a-ZA--3).

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