CVD showerhead alignment apparatus

Details CVD showerhead alignment apparatus CVD showerhead alignment apparatus

2008-12-08

2011-10-11

Hong, John C (Department: 3726)

Metal working

Method of mechanical manufacture

With testing or indicating

C029S281400

Reexamination Certificate

active

08033001

ABSTRACT:
A method and apparatus for aligning a CVD showerhead, comprising engaging a showerhead stem clamp with a showerhead stem outside of a process chamber of the CVD system. An alignment fixture is provided, and a plurality of spacer discs are positioned between the showerhead suspended from a top plate of the CVD system and heated platen. Nuts supporting the showerhead to the top plate are loosened, therein permitting the showerhead to move vertically within the process chamber. The process chamber is closed and the top plate is lowered, wherein the showerhead contacts the plurality of spacer discs. The alignment fixture is engaged with the showerhead stem clamp, therein fixing a vertical position of the showerhead with respect to the top plate, and the top plate is raised. The position of the of the showerhead is then fixed with respect to the top plate via a plurality of standoffs, an adjustment bracket, a threaded rod, and a plurality of nuts.

REFERENCES:
patent: 6596133 (2003-07-01), Moslehi et al.
patent: 2005/0050708 (2005-03-01), Huang et al.
patent: 2006/0263522 (2006-11-01), Byun
patent: 2009/0107403 (2009-04-01), Moshtagh et al.

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