Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1997-12-11
2000-05-09
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427577, 427122, 427575, 427580, 423446, 117929, C23C 1626, B05D 306
Patent
active
060601183
ABSTRACT:
There is provided a diamond crystal in which the (111) oriented plane is of the diamond crystal synthesized on a substrate by a chemical vapor deposition method parallel to a substrate surface, and the area of the (111) oriented plane parallel to the substrate surface is 1/24or less an area of the crystal on the substrate. A source gas is activated on a substrate consisting of a material which is not reactive with carbon. The source gas contains at least carbon and hydrogen in such a manner that the ratio of the number of carbon atoms to the total number of molecules of the source gas is 0.5% or less. Subsequently, a diamond crystal in which the (111) orientation plane is parallel to the substrate surface, and the area of the (111) orientation plane parallel to the substrate surface is precipitated on the substrate. A copper plate is preferably contains used as the substrate. The source gas preferably contains at least methane gas and hydrogen gas, and the concentration of methane gas is preferably set to be 0.5% or less.
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Ishikura Takefumi
Kawarada Hiroshi
Ojika Shin-ichi
Yamashita Satoshi
King Roy V.
Tokyo Gas Chemicals Co., Ltd.
Tokyo Gas Co. Ltd.
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