CVD method for forming B.sub.i -containing oxide superconducting

Details CVD method for forming B.sub.i -containing oxide superconducting CVD method for forming B.sub.i -containing oxide superconducting

1992-08-05

1994-03-22

King, Roy V.

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505730, 505734, 505742, 427 62, 4272553, 4272552, 4272551, 4271263, 427314, C23C 1600, B05D 512

Patent

active

052964604

ABSTRACT:
Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.

REFERENCES:
Natori et al, "Superconducting B.sub.i -Sr-Ca-Cu-O thin films grown by metalorganic chemical vapor deposition at different temperatures", Jpn. J. Appl. Phys. 28(9) Sep. 1989 pp. L1578-1580.
Zhao et al, "Organometallic chemical vapor deposition of high Tc superconducting films using a volatile, fluorocarbon-based precursor", Appl. Phys. lett. 53(18) Oct. 1988 pp. 1750-1752.
Zhang et al, "Organometallic chemical vapor deposition of high Tc superconducting B.sub.i -Sr-Ca-Cu-O films", Appl. Phys. lett. 54(12) Mar. 1989 pp. 1166-1168.
Berry et al, "Growth of superconducting thin films of Bismuth-strontium-calcium-copper oxide by organometallic chemical vapor deposition" Journal of Crystal Growth 92(1988) pp. 344-347.
Yamane et al, "Preparation of B.sub.i -Sr-Ca-Cu-O Superconducting Films by CVD", Jpn. J. Appl. Phys. 28(5) May 1989 pp. L827-L830.
Panson et al, "Chemical vapor deposition of YBa.sub.2 Cu.sub.3 O.sub.7 using metalorganic chelate precursors", Appl. Phys. lett. 53(18) Oct. 1988, pp. 1756-1758.
Yamane et al, "Formation of Bismuth serontium calcium copper oxide superconducting films by chemical vapor deposition", Jpn. J. Appl. Phys. vol. 27, No. 8, Aug. 1988 pp. L1495-L1497.

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