CVD diamond-coated composite substrate containing a...

Details CVD diamond-coated composite substrate containing a... CVD diamond-coated composite substrate containing a...

2008-05-06

2008-05-06

Morgan, Eileen P. (Department: 3723)

Abrading

Accessory

Dressing

C451S056000, C427S249800, C428S408000

Reexamination Certificate

active

07367875

ABSTRACT:
The present invention relates to a composite material and the method of making same, which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of applications. One example of the composite material is a composite of SiC and free silicon metal known as Reaction-Bonded Silicon Carbide. Several examples of applications of the invention include: 1) heads or disks for conditioning polishing pads, including pads used in Chemical-Mechanical-Planarization, 2) cutting and dressing tool inserts and tips, 3) heat spreaders for electronic devices, and 4) wear components including mechanical seals and pump seals.

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