Coating apparatus – With indicating – testing – inspecting – or measuring means – With means for visual observation
Patent
1999-07-14
2000-09-12
King, Roy V.
Coating apparatus
With indicating, testing, inspecting, or measuring means
With means for visual observation
118712, 118723MW, 118723ME, B05C 1100, C23C 1600
Patent
active
06117243&
ABSTRACT:
A CVD device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device and an optical detective device, wherein the plasma-igniting device and optical detective device are connected to a control and analysis unit, analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line of the plasma.
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King Roy V.
Schott Glaswerke
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