CVD device for coating the inside of hollow bodies

Details CVD device for coating the inside of hollow bodies CVD device for coating the inside of hollow bodies

1999-07-14

2000-09-12

King, Roy V.

Coating apparatus

With indicating, testing, inspecting, or measuring means

With means for visual observation

118712, 118723MW, 118723ME, B05C 1100, C23C 1600

Patent

active

06117243&

ABSTRACT:
A CVD device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device and an optical detective device, wherein the plasma-igniting device and optical detective device are connected to a control and analysis unit, analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line of the plasma.

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patent: 5690745 (1997-11-01), Grunwald et al.
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