Curvilinear variable axis lens correction with shifted dipoles

Details Curvilinear variable axis lens correction with shifted dipoles Curvilinear variable axis lens correction with shifted dipoles

1996-12-18

1998-08-11

Font, Frank G.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 250396R, 359637, 359622, 359624, G21K 108

Patent

active

057930481

ABSTRACT:
An improved particle lens has an axis that is shifted to follow the central ray of the beam as it is deflected through the lens creating, in effect, a variable curvilinear optical axis for the lens and introducing aberrations depending on the object size and the distance off the lens symmetry axis. These aberrations are corrected by a set of wire pairs perpendicular to the system axis to add a gradient of the z-component of the magnetic field by which aberrations are generated of the same type but opposite direction as those inherent in the system.

REFERENCES:
patent: 4544846 (1985-10-01), Langner et al.
patent: 4859856 (1989-08-01), Groves et al.
patent: 5200857 (1993-04-01), Matsushita
patent: 5490013 (1996-02-01), Shimizu et al.
patent: 5596433 (1997-01-01), Kanuma
patent: 5635719 (1997-06-01), Petric

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