Curvilinear variable axis lens correction with crossed coils

Details Curvilinear variable axis lens correction with crossed coils Curvilinear variable axis lens correction with crossed coils

1996-12-18

1998-01-13

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, H01J 3714

Patent

active

057082740

ABSTRACT:
A charged particle lens has an axis that is shifted to follow the central ray of the beam as it is deflected through the lens creating, in effect, a variable curvilinear optical axis for the lens and introducing aberrations having depending on the object size and the distance off the lens symmetry axis. These aberrations are corrected by a set of coil pairs tilted with respect to the system axis, which generate compensating aberrations of the same type.

REFERENCES:
patent: 4383176 (1983-05-01), Yonezawa et al.
patent: 4414474 (1983-11-01), Crewe

Affiliated with

Also associated with

Rating

Curvilinear variable axis lens correction with crossed coils does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Curvilinear variable axis lens correction with crossed coils, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Curvilinear variable axis lens correction with crossed coils will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-328913