Curvilinear variable axis lens correction with centered dipoles

Details Curvilinear variable axis lens correction with centered dipoles Curvilinear variable axis lens correction with centered dipoles

1996-12-18

1998-05-26

Nelms, David C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

25049223, 359618, G21K 108, G21K 510, G02B 2710

Patent

active

057570108

ABSTRACT:
An improved particle lens has an axis that is shifted to follow the central ray of the beam as it is deflected through the lens creating, in effect, a variable curvilinear optical axis for the lens and introducing aberrations having depending on the object size and the distance off the lens symmetry axis. These aberrations are corrected by a set of correction elements generating compensating aberrations of the same type, comprising at least one wire pair perpendicular to the system axis and carrying fixed currents to introduce a gradient in the field, together with three coils centered on the system axis to cancel a bias field introduced by the wire pair.

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