Curved surfaces formed by etching and thermal processing

Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

428120, 428213, 359570, 359573, 359575, 359741, 359743, B32B 300, G02B 518

Patent

active

058076220

ABSTRACT:
A smooth contoured structure is formed from a planar surface by etching mesas of equal height into the surface and heat treating the structure to mass transport material above the desired contour to fill in voids below the desired contour. In an alternate embodiment, an optical element is formed using a patterned layer of sacrificial material and thermally treating the sacrificial layer to form a precursor contour line. The line is then transformed onto a substrate and smoothed to form the optical element.

REFERENCES:
patent: 4468850 (1984-09-01), Liau et al.
patent: 4650744 (1987-03-01), Amano
patent: 4718070 (1988-01-01), Liau et al.
patent: 4722092 (1988-01-01), Liau et al.
patent: 4777148 (1988-10-01), Liau et al.
patent: 4784722 (1988-11-01), Liau et al.
patent: 4894840 (1990-01-01), Liau et al.
patent: 4935939 (1990-06-01), Liau et al.
patent: 4990465 (1991-02-01), Liau et al.
patent: 5153052 (1992-10-01), Tanaka et al.
Goodhue, W. D., et al., "Monolithic Two-Dimensional Surface-Emitting Strained-Layer InGaAs/AlGaAs and AllnGaAs/AlGaAs Diode Laser Arrays with Over 50% Differential Quantum Efficiencies," Appl. Phys. Lett. 59(6): 632-634 (1991).
Liau, Z. L., "Prevention of In Evaporation and Preservation of Smooth Surface in Thermal Annealing and Mass Transport of InP," Appl. Phys. Lett. 58(17):1869-1871 (1991).
Goodhue, W.D., et al., "Monolithic Two-Dimensional GaAs/AlGaAs Laser Arrays Fabricated by Chlorine Ion-Beam-Assisted Micromachining," Journal of Electronic Materials, 19(5):463-469 (1990).
Liau, Z. L., "Gallium Phosphide Microlenses by Mass Transport," Appl. Phys. Lett. 55(2):97-99 (1989).
Liau, Z. L., "Large-Numerical-Aperture InP Lenslets by Mass Transport," Appl. Phys. Lett. 52(22):1859-1861 (1988).
Wada, Osamu, "Ion-Beam Etching of InP and Its Application to the Fabrication of High Radiance InGaAsP/InP Light Emitting Diodes," J. Electrochem. Soc.: Solid-State Science and Technology, 131(10):2373-2380 (1984).
Liau, Z. L., "Large-Numerical-Aperture Microlens Fabrication by One-Step Etching and Mass-Transport Smoothing," Appl. Phys. Lett., 64(12):1484-1486 (1994).
Liau, J. L. and Walpole, J. N., "Mass-Transported GaInAsP/InP Lasers," The Lincoln Laboratory Journal, 2(1):77-92 (1989).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Curved surfaces formed by etching and thermal processing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Curved surfaces formed by etching and thermal processing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Curved surfaces formed by etching and thermal processing will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-85224

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.