Curved grooving of polishing pads

Metal working – Method of mechanical manufacture – Shaping one-piece blank by removing material

Reexamination Certificate

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C409S143000, C409S132000, C451S056000

Reexamination Certificate

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11592910

ABSTRACT:
A method is provided for forming grooves in a polishing pad useful for planarizing a substrate in a chemical mechanical planarization process. The method maintains average velocity as a function of bit diameter to enable groove formation using a rotating bit, whereby grooves can be formed at a higher rate while maintaining high groove quality and low defectivity.

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