Metal working – Method of mechanical manufacture – Shaping one-piece blank by removing material
Reexamination Certificate
2007-06-26
2007-06-26
Cadugan, Erica (Department: 3722)
Metal working
Method of mechanical manufacture
Shaping one-piece blank by removing material
C409S143000, C409S132000, C451S056000
Reexamination Certificate
active
11592910
ABSTRACT:
A method is provided for forming grooves in a polishing pad useful for planarizing a substrate in a chemical mechanical planarization process. The method maintains average velocity as a function of bit diameter to enable groove formation using a rotating bit, whereby grooves can be formed at a higher rate while maintaining high groove quality and low defectivity.
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Naugler Steven
Pufka Steven J.
Stack Jeffrey R.
Wang Weitung
Biederman Blake T.
Cadugan Erica
Rohm and Haas Electronic Materials CMP Holdings Inc.
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