Curved graphite furnace elements

Details Curved graphite furnace elements Curved graphite furnace elements

1998-08-21

2000-07-04

Speer, Timothy M.

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

428 341, 373111, 373117, 373118, 219552, 219553, B32B 900

Patent

active

060836253

ABSTRACT:
A graphite furnace element, such as a heat shield or heating element, comprises a plurality of bent, rigid, solid and arcuate-shaped graphite sheets that have been joined together, usually by screws or bolts. The bent graphite sheets typically have a wall thickness between 0.05 and 0.5 inch.

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Helgeland et al., "Growing Semiconductor Crystals Using the Czochralski Method," Microelectronic Manufacturing and Testing, Apr. 1983, pp. 1-6.
"GRAFOIL" Flexible Graphite Sheets, UCAR Carbon Company, 1988, various catalogue pages.

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