Current waveform analysis for testing semiconductor devices

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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3241581, 714736, G01R 3128

Patent

active

060377968

ABSTRACT:
A method of testing a semiconductor device includes generating a current waveform for the semiconductor device by measuring the response of the device to an initializing vector group and comparing the current waveform to a golden waveform to determine whether the semiconductor device is good or defective. Apparatus for testing the semiconductor device includes a vector generator providing an initialization vector group to the semiconductor device, a measurement unit for measuring a plurality of current measurements from the semiconductor device which responds to the input of the initialization vector group, a generation unit for generating a current waveform from the current measurements of the semiconductor device, and an analysis unit for comparing the current waveform to a golden waveform to determine whether the device falls outside a tolerance margin of the golden waveform.

REFERENCES:
patent: 5043910 (1991-08-01), Chiba
patent: 5592077 (1997-01-01), Runas et al.
patent: 5670892 (1997-09-01), Sporck
patent: 5731700 (1998-03-01), McDonald
patent: 5731984 (1998-03-01), Ullmann
patent: 5926486 (1999-07-01), Siulinski

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