Coherent light generators – Particular component circuitry – Optical pumping
Patent
1997-12-15
1999-08-17
Scott, Jr., Leon
Coherent light generators
Particular component circuitry
Optical pumping
H01S 300
Patent
active
059404213
ABSTRACT:
A simple, novel pulse power circuit is described, which improves the net coupling efficiency of a pulse power system used to drive a gas discharge laser, and minimizes current reversal and electrode erosion. The circuit, in accordance with an embodiment of the present invention, incorporates a saturable inductor. Contrary to conventional saturable inductor configurations, in which the saturable inductor is either not saturated or is presaturated in a reverse direction, in the present circuit the saturable inductor is presaturated in the forward direction.
The saturable inductor is inserted between the final stage capacitor of a pulse power circuit and a gas discharge load, where it allows forward current but effectively blocks reverse current through the load. Elimination of reverse discharge current reduces electrode erosion and improves discharge chamber life.
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Birx Daniel L.
Ness Richard M.
Partlo William N.
Cymer Inc.
Jr. Leon Scott
Tiffany William B.
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