Curing silica precursors by exposure to nitrous oxide

Details Curing silica precursors by exposure to nitrous oxide Curing silica precursors by exposure to nitrous oxide

1992-11-02

1998-10-13

Bell, Janyce

Coating processes

Electrical product produced

Metallic compound coating

427226, 427240, 427421, 427387, 4274301, 427379, 427420, B05D 512

Patent

active

058209239

ABSTRACT:
Silica-containing ceramic coatings are produced on substrates at low temperatures by applying a coating comprising a silica precursor on a substrate and heating the coated substrate under an environment comprising nitrous oxide at a temperature sufficient to convert the silica precursor to the silica-containing ceramic coating. This method is especially valuable for forming protective and dielectric coatings on electronic devices.

REFERENCES:
patent: 4239811 (1980-12-01), Kemlage
patent: 4749631 (1988-06-01), Haluska et al.
patent: 4842888 (1989-06-01), Halluska et al.
patent: 5112676 (1992-05-01), Cot
patent: 5116637 (1992-05-01), Baney et al.

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