Curing oven system for semiconductor devices

Details Curing oven system for semiconductor devices Curing oven system for semiconductor devices

1988-06-13

1989-05-16

Yuen, Henry C.

Heating

With work cooling structure

432 78, 432 81, 432 83, F27D 1502

Patent

active

048306096

ABSTRACT:
An automated curing oven system for use in the manufacturing of semiconductors. This system may easily be incorporated with other automated machinery used for various semiconductor processing steps because it employs the same device holding magazine used for many other steps. The device holding magazine serves as the oven chamber itself thereby eliminating many manual handling steps.

REFERENCES:
patent: 1658333 (1928-02-01), Hanley, Jr.
patent: 2201988 (1940-05-01), Cope
patent: 2205182 (1940-06-01), Whitten
patent: 3470624 (1969-10-01), Plotkowiak
patent: 4249895 (1981-02-01), Mantegani
patent: 4560348 (1985-12-01), Moller et al.
patent: 4773851 (1988-09-01), Mueller

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