Cubic boron nitride preparation

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204192R, 204192C, 204164, 427 38, C23C 1500

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active

044154208

ABSTRACT:
Cubic boron nitride is deposited on a substrate by an activated reactive evaporation method involving heating a substrate in a vacuum, evaporating metal vapors into a zone between the substrate and the metals source, said source consisting of pure boron or boron and a material selected from the group consisting of the elements chromium, nickel, cobalt, and manganese co-evaporated, or an alloy consisting essentially of from 0.1 weight percent to 5.0 weight percent of at least one of the elements chromium, nickel, cobalt, and manganese, the balance being boron, introducing ammonia gas into the zone, and generating an electrical field in the zone in order to ionize the metal vapors and gas atoms in the zone.

REFERENCES:
patent: 3551312 (1970-12-01), Kahng et al.
patent: 3708325 (1973-01-01), Kurtz
patent: 4194930 (1980-03-01), Tanaka et al.
patent: 4297387 (1981-10-01), Beale
patent: 4309227 (1982-01-01), Kajikawa et al.

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