Crystallization mask, crystallization method, and method of...

Details Crystallization mask, crystallization method, and method of... Crystallization mask, crystallization method, and method of...

2007-05-29

2007-05-29

Rosasco, S. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

10993648

ABSTRACT:
A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.

REFERENCES:
patent: 6959029 (2005-10-01), Voutsas et al.
patent: 7011911 (2006-03-01), Kim et al.
patent: 7018750 (2006-03-01), Hwang

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