Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2011-08-30
2011-08-30
Spector, David N (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S240000
Reexamination Certificate
active
08009345
ABSTRACT:
A crystallization apparatus includes a light modulation element, and an image forming optical system that forms a light intensity distribution set based on light transmitted through the light modulation element on an irradiation surface. The crystallization apparatus irradiates a non-single crystal semiconductor film with light having the light intensity distribution to generate a crystallized semiconductor film. A curvature radius of at least one isointensity line of a light intensity substantially varies along the isointensity line in the light intensity distribution on the irradiation surface, and a curvature radius of at least a part of the isointensity line has a minimum value of 0.3 μm or below.
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Azuma Kazufumi
Endo Takahiko
Kato Tomoya
Matsumura Masakiyo
Taniguchi Yukio
Advanced LCD Technologies Development Center Co. Ltd.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Spector David N
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