Crystalline Si.sub.x C.sub.y N.sub.z and method for synthesis

Chemistry of inorganic compounds – Silicon or compound thereof

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

423344, 427249, 427255, 4272552, 117 92, 117101, 117103, 117108, C01B 3300

Patent

active

060903589

ABSTRACT:
A novel material Si.sub.X C.sub.y N.sub.z, having a crystal structure similar to that of a.Si.sub.3 N.sub.4 with carbon atoms substituting most of the Si sites, is synthesized in crystalline form onto crystalline Si substrates by microwave plasma enhanced decomposition of carbon, silicon and nitrogen containing gasses.

REFERENCES:
patent: 4737379 (1988-04-01), Hudgens et al.
patent: 5110679 (1992-05-01), Haller et al.
patent: 5236545 (1993-08-01), Pryor
patent: 5254374 (1993-10-01), Devlin et al.
patent: 5320878 (1994-06-01), Maya
patent: 5508368 (1996-04-01), Knapp et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Crystalline Si.sub.x C.sub.y N.sub.z and method for synthesis does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Crystalline Si.sub.x C.sub.y N.sub.z and method for synthesis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Crystalline Si.sub.x C.sub.y N.sub.z and method for synthesis will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2033525

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.