Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction
Patent
1989-12-19
1991-07-23
Straub, Gary P.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Including specific material of construction
156605, 1566171, 156DIG115, C30B 1512, C30B 3500
Patent
active
050342002
ABSTRACT:
A crystal pulling apparatus of double structure crucible has a crucible body which is divided into inner and outer chambers by a cylindrical partition wall coaxially disposed in the crucible body. A melt supplying path used to supply melt from the outer chamber of the crucible to the inner chamber in which the crystal is pulled is formed of a small through hole formed in the partition wall or the small through hole and a pipe-like passage formed in communication with small through hole. The radius of the inner chamber of the double structure crucible has a specified relation determined by the segregation coefficient of dopant impurity with respect to the radius of the outer chamber. This is, the radius of the inner chamber is set substantially equal to .sqroot.k times the radius of the outer chamber when the segregation coefficient of the dopant impurity is k. In the crystal pulling apparatus with the double structure crucible, a small chamber for introducing dopant is disposed in the outer chamber of the crucible to be in communication with the inner chamber.
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Kojima Masakatu
Yamashita Youji
Kabushiki Kaisha Toshiba
Kalinchak Stephen G.
Straub Gary P.
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